抄録
This paper deals with the modeling of stress singularity at the interface edge between piezoelectric thin films and an elastic substrate. The electro-elastic problem of a transversely isotropic piezoelectric thin film attached on an elastic substrate is treated theoretically. Emphasis is placed on the investigation of the singularity in the stress field at the free edge of interface. The eigen-equation determining the order of the singularity is derived. Numerical results for two edge geometries are presented for PZT film/silicon substrate combinations.
