抄録
This paper presents bio-inspired nanoactuators and banched electrode nanodetectors for high-precision Micro Electro Mechanical System (MEMS) applications. Fabrication errors and electrical noise in MEMS cause the major difficulty to achieve high-precision actuation and detection capabilities. For the nano-precision actuation, we solve the fabrication instability and electrical noise problems using bio-inspired digital actuators with nonlinear mechanical modulators. For the high-precision capacitive detection, we present a branched finger electrodes using high-amplitude anti-phase sensing signals. We also demonstrate the potential applications of the nanoactuators and nanodetectors to high-precision positioning MEMS.
