抄録
Data-storage using near-field optical microscopy is a promising technology for the breakthrough of high-density optical disk memory since wavelength limit of conventional lens-optics is not applied. We have proposed a MEMS for the near-field optical data storage, which consists of integrated optical micro-probes and a micro media-translation-table. In the first part of the presentation, three-dimensional lithography based on the bulk micromachining using resist spray coater is described. Secondly, we describe the integration of waveguide, micro-pinhole tip, cantilever, and photodiode for a MEMS probe. The media-translation-table consisting of the inverted scratch drive actuators is also described.
