抄録
This paper describes the electrowetting-on-dielectric (EWOD) actuation of liquid droplets for transportation of micromechanical components. As the dimension of mechanical parts decreases, surface tension and electro static forces become dominant compared to gravity force. Recent studies show that these forces can be utilized for actuation of liquid droplets and lubrication of hydrophobic surfaces of small objects. In this study, actuation of liquid droplet by EWOD, and its application to micro transportation systems driven by the droplets are proposed. A device for the transportation system was fabricated by MEMS techniques and the behavior of the liquid droplet actuated by EWOD was investigated experimentally using a high speed camera.
