抄録
An electrohydrodynamic (EHD) micropump to generate oscillating flow is newly developed and experimentally tested. The size of the present EHD pump is 24×30×7.8mm. A pumping channel fabricated in this EHD pump is bended in parallel in order to extend the pumping channel. The channel has the dimensions of 24×48×0.9mm, in which ten pairs of electrodes are fabricated. The maximum static pressure generated by the present EHD pump is about 550 Pa at the input of dc 1 kV, and maximum flow-rate is 4.3 ml/min at unloaded condition. In order to generate symmetric oscillating flows, alternate voltage is applied. It is ascertained that the present EHD pump is successful in generating the symmetric oscillating flows at low frequencies (0.01 Hz〜0.05 Hz).
