抄録
This paper reports the lower cost mirror device composed of the inexpensive glass and the polymer material. This device is a new construction composed of the glass as the substrate and the polymer as the torsion bar. The polymer mirror containing the magnetic particles is used. The device can be fabricated only by the photolithography technology. We adopted the actuation system which attracts the mirror directly with the electromagnet. We fabricated the large-sized mirror (20mm×10mm) device of one axis deflection and evaluated the characteristics of the fabricated mirror device. Then, we confirmed the performance of large deflection angle which was larger compared with the conventional device in the deviation angle. As the result, we confirmed the possibility to realize the magnetic actuation type low cost polymer MEMS mirror.
