抄録
This paper presents the characteristics of the AC drive of a micro electro mechanical system (MEMS) mirror for suppressing mirror angle drift caused by the charging effect. We measured the stability of a mirror tilt angle when the pulse amplitude modulation drive and the pulse width modulation drive are used as angle control techniques of the MEMS mirror, respectively. Angle stabilities were measured from the optical power by using the reflected light from a mirror. The fluctuations of optical power were less than 0.1 dB for a period of 15 hours with both techniques as against 10 dB with DC drive. Moreover, the pulse width modulation drive uses inexpensive devices and improves the linearity of mirror angle control.
