Abstract
We present design, fabrication, and characterization of a small (12×12×8mm) movable railway vehicle for sensor-carrying. The millimeter-sized railway vehicle (MRV) was mainly composed of a vibrational structure and three legs. A railway was designed and fabricated to power and guide the MRV. The MRV with legs on the railway was moving due to its high-frequency vibration. FEM simulations were performed to design the legs. Then, the MRV and the railway were fabricated by precision machining. Finally, the MRV was tested. The result shows that the MRV was moving along the railway and its maximum speed was 12.2 mm/s.