抄録
Micro-motion stages are used for ultra-precise positioning. Accordingly, a high resonance frequency is required. That also requires a longer stroke. There are two ways to raise the resonance frequency. One is to lighten the moving part. The other is to increase the rigidity of the spring. On the other hand, to lengthen the stroke requires suppression of stress. This development does not allow the moving part to be made smaller. Therefore, it is difficult to lighten the moving part. Thus, maintaining the rigidity of the spring can achieve a high resonance frequency.
