P-PRE-03 Principle and Basic Characteristics of a New Optical MEMS Switch Using a Belt-shaped Thin Film Mirror(MM/Micro/Nano Precision Equipments,Technical Program of Poster Session)
This paper describes the principle and basic characteristics of a new optical MEMS switch using a belt-shaped thin film mirror. The thin film mirror between the two substrates is deformed and driven by electrostatic force. The effect of the design parameters of the switch on the minimum driving voltage is examined.
