WS-02 MEMS/NEMS TECHNOLOGIES FOR INFORMATION DEVICES(For a construction of future technology-From "micro-nano" to "intelligence"-,Workshop)

抄録

In the past decades, the application of microelectronic technology to the fabrication of mechanical devices stimulated emerging research in micro/nano sensors and actuators. The versatility of semiconductor materials and the miniaturization of VLSI patterning techniques promise new systems with better capabilities and improved performance-to-cost ratio over those of conventionally machined devices. This talk will discuss MEMS/NEMS technologies and it applications to information devices, such as the design, fabrication and testing of MEMS/NEMS force and strain sensors to monitor disk/head contacts. Specifically, a micro pressure sensor and a pitch and roll motion sensor have been designed, fabricated and tested for possibly applications in the field of information devices.