Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE
Online ISSN : 2424-3132
セッションID: MoB-2-1
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MoB-2-1 CHARACTERISTICS OF TI-NI-ZR THIN FILM METALLIC GLASSES FOR MEMS WITH THREE DIMENSIONAL STRUCTURE
Junpei SakuraiMizue MizoshiriSeiichi Hata
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We investigated characteristics of Ti-Ni-Zr thin film metallic glasses (TFMGs). The Ti-Ni-Zr amorphous thin films having Ni-content of more than 50 at.% and Zr-content of more than 11 at.% exhibited glass transition. Although the Ti_<39> Ni_<50> Zr_<11> sample had alloy composition at the boundary between TFMG and only amorphous, it showed the lowest glass transition temperature T_g of 703 K and wide width of supercooled liquid region (SCLR) ΔT of 57 K. Moreover, this sample showed a high thermal stability at the T_g . However, it is considered that viscosity of this sample was higher than those of other TFMGs
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© 2015 一般社団法人 日本機械学会
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