Abstract
A new pressure measurement method has been developed by applying the change of the electronic conductivity of CNTs. It is reported that the electric conductivity of MWCNTs changes drastically under uniaxial strain because of the drastic change of their band gap. In this study, the authors have developed a two-dimensional pressure sensor, which consists of area-arrayed fine bundles of MWCNTs by applying MEMS technology. The special resolution of the developed sensor was 500 μm, which was higher than that of human finger, 1000 μm. Under the application of compressive strain, the electric resistance was confirmed to increase almost linearly with the applied strain.
