抄録
In order to enable the precise position control of machines and prevent various machinery failures in advance, it is necessary to monitor the stress and strain fields in the working parts with high sensitivity. Therefore, the authors have developed a strain sensor on a flexible substrate using graphene as a material for highly sensitive and micro-sized strain sensor. In this study, chemical vapor deposition (CVD) method was used for the synthesis of graphene on the Cu foil. After the synthesis, the graphene sheet was transferred on a Si/SiO_2 substrate and a graphene-based strain sensor was fabricated by applying MEMS technique. The strain dependence of the electrical conductivity of the sensor was evaluated.
