マイクロ波原子間力顕微鏡を用いた局所導電率測定に及ぼす試料表面形状の影響

抄録

With the development of nanotechnology in recent years, many researchers have focused on the development of nanomaterials and nanostructures. To apply these nanomaterials and nanostructures into nanodevices, the measurement technology for measuring electrical properties at high spatial resolution has been requested. Therefore, our group has developed Microwave Atomic Force Microscopy (M-AFM) in order to assess electrical conductivity in a minute area. This paper describes influence of material surface on the measurement of local electrical conductivity using M-AFM. Results of this experiment indicate actually that M-AFM can measure electrical conductivity in a local area accurately without being affected by the material surface.