マイクロ波が誘起する探針―試料間原子間力による局所誘電率評価

抄録

With the development of nanotechnology, different types of scanning probe microscopy (SPM) have been developed to satisfy the requirement of nanotechnology. The microwave detection system is combined on the atomic force microscopy (AFM) to evaluate the electrical properties of the materials simultaneously. It is found that when microwave is applied through the probe, the microwave has interaction with the material. In this paper, the mechanism of the interaction between the microwave and material is investigated. We evaluated the probes by the microwave atomic force microscope (M-AFM) and verified our theoretical work. The result implies that the interatomic force between the tip and sample can be utilized to evaluate the permittivity of semiconductor and insulator materials.