レーザピーニングによるセラミックスの曲げ強度特性の改善

抄録

The aim of this study is to improve the strength and reliability of ceramics by laser peening. We applied laser peening to silicon nitride and investigated its properties such as the surface roughness, bending strength and residual stresss. Based on the evaluation results, the optimum laser peening conditions were selected. Compressive residual stress was induced by laser peening up to a depth of 60 μm. Owing to the effect of the compressive residual stress introduced by laser peening, the bending strength of silicon nitride was improved, and the scatter of the bending strength was reduced. Thus, laser peening is effective to improve the strength and reliability of ceramics.