抄録
Today, the demand for microscopic machining becomes higher and higher due to high-density semiconductors, high quality printers, minituarization of IT related products and likes. Linear motor drive EDMs developed by Sodick provides superior performance in microscopic machining because of its high speed and highly responsive servo system. This report mainly explains microscopic hole machining less than φ 0.1mm and other microscopic machining technology with linear motor drive EDMs.
