生産加工・工作機械部門講演会 : 生産と加工に関する学術講演会
Online ISSN : 2424-3094
会議情報
319 微細パターン創成におけるインプロセス力計測の研究(第 1 報)
高 偉源田 聡清野 慧
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会議録・要旨集 フリー

p. 197-198

詳細
抄録
A machining system of diamond turning based on the fast tool servo technique has been constructed for generating micro-patterns. To accurately generate the micro-pattern and understand the nano-cutting phenomenon, it is desired to monitor the machining force in the machining process. In this paper, an instrument was designed and fabricated to moni-tor the machining forces during diamond turning of the micro-pattern. Instrument design and measurement results are presented.
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© 2000 一般社団法人 日本機械学会
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