抄録
As one of the core technologies of the one-stop grinding machine forφ300mm silicon wafer manufacturing, a precision positioner using Giant Magnetostrictive Material (GMM) has been successfully developed to control infeed and posture of the grinding head. With the closed-loop feedback control, the actuator is able to move half a ton of payload at the resolution of 6.25Å. The first trail test has shown the result of surface roughness Ra less than 1nm and global flatness less than 0.2μm.
