抄録
Plane honing machining technique have many advantages of high removal rate, low machining damage, good surface quality etc. We have applied the plane honing machining technique to a low-cost planarization process of core glass of PLC (Planar Lightwave Circuit). The machining characteristics such removal rate and surface roughness in machining of the optical glass are investigated, and it was proved that the good finished surface roughness below 20nmRa with SD#1500 wheel and 2nmRa with SD#3000 wheel is obtained. Furthermore, the core glass is successfully machined to be about 15μm thickness with the plane honing machining Technique. The technique has bright prospects as a new planarization process.
