In the finishing of high precision aspherical surfaces, computer-controlled small tool polishing is usually employed to maintain or improve the obtained form accuracy. It is necessary to grasp the characteristics of the small tool, such as the relationships between polishing conditions and material removal distribution or material removal rate. Some investigations about a disc-shaped small rotary polisher had been made in the previous research. In this paper, we made further efforts to reveal behaviors of the small rotary polisher when polishing at edge areas and inclined surfaces. It was found that the polisher can maintain balance when overhang is less than 1/3 of its diameter, and different scan direction gives varied influence to the material removal distribution when polishing inclined surface.
