抄録
This research examines the machining characteristics of a new micro-machining process featuring ultrasonic cavitation in distilled water. In the process, the cavitation based on the ultrasonic vibration varies with the geometry of the tool and the clearance between the target surface of the workpiece and the tool connected to the horn. The effects of the tool geometry and clearance must change the erosive action of cavitation and thereby the material removal. The machining experiments demonstrated that the smaller the clearance and the deeper the tapered angle of the tool tip, the deeper was the machined depth because of the higher machining force due to the enhanced cavitation. In those cases, the machined geometry closely followed the tool's geometry. At clearances larger than a certain value, regardless of the tool geometry, the cavitation generates a dent in the area corresponding to the center of the tool.
