抄録
In this study, we developed a diamond AFM cantilever for micro-to-nano scale machining. The diamond AFM cantilever is composed of single crystal silicon cantilever and a cutting edge with controlled tip shape. The former is fabricated by anisotropic etching of the single crystal silicon, the latter is taken out from diamond array tool. By using this cantilever to AFM machining for single crystal silicon, plane machining area was formed deep rectangular shape cavity. The depth of machining area was deeply with increasing normal load. And the chip of silicon was observed largely by SEM image. It was found that the diamond AFM cantilever was possible to machining with high efficiency and accuracy.
