抄録
Laser machining is one of the most promising technologies for micro-fabrication as it benefits from its high power density, micron sized spot and non-contact accessibility. In most conventional Laser machining process however, the material is removed above its melting temperature by transforming the Laser power into heat energy. On the other hand, the material is also possible to be removed by a behavior called "ablation" if the incoming Laser power is big enough. Unlike the heating process, "ablation" directly breaks off the chemical bonding of the materials without introducing heat effect. Recent research have founded "ablation" is achievable by multi-photon absorption with Laser which produces pulse duration as short as pico(10^<-12>) and femto(10^<-15>) second. The aim of this study is to explore the potential of applying ultra short pulsed Laser into micro-fabrication. In this research, an ultra short pulsed laser micromachining system has been developed and its performance in three-dimensional micro-machining has been studied.
