228 ファストツールサーボによる超精密非軸対称非球面金型の加工(OS-6 超精密加工)

抄録

A fast tool servo system is constructed with ultrahigh precision machine tool and precision motion stage driven by piezoelectric actuator. The system is capable of driving both cutting tool and grinding spindle with displacement controller with 16 million point tables. An ultraprecision mold for non-axissymmetric aspherical optics was machined by the system and the fabricated surface was evaluated by three dimensional ultrahigh accuracy measurement system and analyzing software newly developed for the purpose. Since the feed back system of piezo actuator is improved, the precision of machined mold surface was about 160nm p-v.