Recently, accuracy improvement of the molds is more and more required for the precise molding of aspherical glass lenses. These and moulds are mostly ground with micro diamond wheels, but require additional fmishing process such as polishing. In this study, ultrasonic two-axes vibration assisted polishing system with piezo-electric actuators was proposed and developed in order to apply to the high-precision and high-efficiency polishing of the aspherical molds and dies. From the experiments of the micro aspherical tungsten carbide molds, it is clarified that the newly developed two-axes vibration polishing method is useful for the efficient and precision polishing of micro aspherical molds.
