E32 テーブルトップ硬X線望遠鏡用非球面反射鏡の超精密加工(OS-11 超精密加工(2))

抄録

Small sized aspherical Pt/C multilayer mirrors of 20 mm in diameter for hard X-ray imaging were made from ultra-precision electroless nickel dies by a molding method in order to inspect the optical imaging properties of next-generation hard X-ray telescope mirrors which will be made by a new technology. Electroless nickel is the key material for making large-sized molding dies of hard X-ray telescope mirrors because of its machinability and durability. Electroless nickel molding dies of parabolic and hyperbolic in revolution were obtained in the range of ±50 nm shape accuracy and less than 0.3 nm rms in surface roughness by single-point diamond turning and ultra-precision polishing. Pt/C multilayer aspheric inner mirrors were obtained from the electroless nickel molding dies by the special molding technique.