抄録
Experimental study on a thermal contact sensor for the detection of defects on smooth surfaces is described. As a prototype of the thermal contact sensor, a several-ten-micrometer-sized thin-film element was fabricated by photolithography processes. By using the fabricated element, both laser exposure tests and friction tests were carried out to investigate the feasibility of the element on detecting small amount of frictional heats. Three types of sensors with the element of different sizes are employed to compare the temperature rises due to the heating. Results of theoretical calculations are also compared with the experimental results to confirm the feasibility of the contact sensor.
