抄録
In order to realize the ultraprecision machining process in future manufacturing environment, it is necessary to eliminate effectively the error factors in machining system. In this study, a direct measurement method which can detect the relative distance between cutting tool edge and workpiece using the evanescent light is proposed to eliminate from the influences of the machining error due to positioning error, thermal deformation and tool wear. Experimental evaluation results confirm that the proposed method is useful for on-machine measurement.
