抄録
This paper describes an adaptive control method for a magnetic drive actuator that used for the laser cutting to realize high speed and high accuracy machining. Firstly, a zero bias current method and a nonlinear compensator are examined and used for the actuator. Secondly, an adaptive control method is presented. Finally, the coefficient of the gap-current-force is estimated and the effectiveness of the presented control method is verified by experiments. The experimental results show that the coefficient of the gap-current-force reduces exponentially depending on the increase in the length of the air gap- By using the adaptive control, the peak-to-peak vibration amplitude of the lens holder is reduced from l .95μm t0 1.55μm. Moreover, the magnetic drive actuator has a positioning resolution of 0.75μm, a bandwidth of 141Hz and a positioning stroke of ±0.5mm.
