抄録
Water driven stage, which is composed of water hydrostatic bearings and water hydraulic piston, was developed for the linear stage of ultra-precision machine tool. Constant feed motion of the stage is needed to produce fine finishing surfaces. To achieve constant feed motion, the design of speed control system is needed. Thus, a mathematical model of the stage was considered in the previous report. This report deals with an open-loop control of the water driven stage with a solenoid-type flow control valve. A mathematical model of the open-loop control system is derived with the use of experimental results. The results indicate that the feed motion less than 1mm/s is achieved by the control system. For instance, the speed of 1 mm/s was obtained by applying the input voltage of 6 V to the flow control valve. The derived model can be used to design feedback control system.
