抄録
It is known that a micro-scale texture on surface improves wettability and friction. The micro-scale texture generated by ultra-precision machining process achieves high accuracy and repeatability. In this study, in order to construct micro structure and form a shape by milling at the same time for reduction in a lead time, a non-contact positioning system driven by a giant magnetostrictive element (GME) was proposed. In this positioning system, the GME drives positioner as an actuator and estimates its displacement as a sensor simultaneously. Furthermore, by using estimated displacement for feedback control, hysteresis of GME can be compensated. Therefore, This positioning system can be driven with noncontact and without additional displacement sensor, and installed to the rotational tool. Through the experiment, it is confirmed that the developed positioning system achieves high resolution and hysteresis compensation by self-sensing function.
