表面圧縮応力の異なる化学強化ガラスのレーザ割断特性

抄録

In this study, the characteristics of laser cleavage of three different types of the chemically strengthened glass is investigated experimentally. Laser cleavage is a method for separating brittle materials using thermal stress caused by laser beam irradiation. A chemically strengthened glass is protected from the breakage by loading the compressive stress on the surface. An initial crack is induced on the surface of each substrate along the scanning line by the CO2 laser beam irradiation with a wavelength of 10.6 μm. After inducing the initial crack, the laser beam is irradiated along the line induced the initial crack to separate the substrate. As results, the depth of the initial crack in the compressive stress layer was relied on the maximum compressive stress on the surface. Additionally, the adequate energy density to separate the substrate loaded high compressive stress was larger in comparison to separation the substrate loaded low compressive stress.