Au薄膜のトランスファプリントに関する研究

-スタンプ形状の影響およびMEMSへの応用-

抄録

Au thin-film is transferred from stamps to micro-grooved SU-8 substrates to fabricate a micro-mechanical element. This present paper describes effects of stamp modulus on the shape of transferred Au thin-film. Lower modulus of PDMS stamp causes undesired deformations with some burrs at the side edges in the Au transferred thin-film, while higher modulus of h-PDMS stamp enable to fabricate flat micro-beam of transferred Au thin-film with little burrs. We also demonstrate to fabricate a micro-tactile sensor by transfer-print of Au thin-film.