左右ボールネジ駆動カウンタバランス制振機構搭載工作機械の振動特性の考察

抄録

In recent years, the miniaturization and densification of the semiconductor package printed wiring boards (PWBs) have been demanded by the miniaturization and multi-functionalization of electronic equipment based on development of IT. For their realization, downsizing of PWBs’ micro-holes and fabrication of highly dense electrical circuit layers are also important. For high-speed and precision drilling, we proposed a feed driving system withright and leftball screw as a counter balance structure.In a previous study, We solved the high-frequency vibration problem of servo systems¹) . In this report, we clarified various vibration modes of machine tools by the finite element method. As a result, the effectiveness of the damping mechanism for the low frequency mode was confirmed.