抄録
In this research, we propose a progressive wave type micropump with hydraulic displacement amplification mechanism. Micropump contains micro-cavities that have different cross-sectional areas between at the upper and lower parts and encapsulate incompressive glycerin with largely-deformable thin PDMS membranes. The flow channel is bonded on the upper part. The lower side is vibrated with the piezo actuator. The progressive wave amplified on the surface of the flow channel according to the difference of the sectional area is generated. As this progressive wave, the fluid is transported.
