抄録
In this study, we intend to develop three-dimensional (3-D) piezoelectric micro power generation devices using a 3-D ceramics molding process based on microstereolithography. In this method, a 3-D polymeric mold fabricated by microstereolithography is immersed in high concentration slurry of ceramics nanoparticles, and then the polymeric mold is thermally decomposed. After sintering of green body, any 3-D ceramics microstructures can be produced. In preliminary experiments, we fabricated piezoelectric cantilevers using slurry of BaTiO_3 nanoparticles. After polarization treatment of the piezoelectric cantilevers, we confirmed that they could generate output voltage due to apply pressure. It will be expected to develop high efficient micro power generation devices by optimizing 3-D shape of ceramics microstructure.
