抄録
Development of a particle manipulation device using microchannel flows and dielectrophoretic (DEP) force generated by micro-membrane-type electrodes attached to the channel bottom wall is described in this study. The electrode shape effects on the DEP force and manipulation performance are discussed using numerical computations and experimental measurements. Particularly, comb-type electrodes in combination with straight-type and semicircle-type ground electrodes were examined. The numerical results showed that semicircle-type electrodes produce a uniform distribution of large DEP force in the electrode area compared with the straight-type electrodes, and the calculated particle motion showed that the semicircle-type electrodes provide a high manipulation performance. The experimental results showed a good correspondence with the numerical ones quantitatively, confirming the computational validation and the performance of the device.
