Grass like architectures were synthesized directly on Cu foils by thermal oxidation method with nickel catalyst at a low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK). The grass like architectures were approximately 8-50μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.