抄録
This paper reports micromachining of titanium using a desktop DRIE. We found that super-high-speed exhaust characteristics is indispensable in the etching of titanium, and etching rate more than 0.2 μm/min was realized with a small amount of etching gas(SF_6). Titanium has good mechanical properties and corrosion resistance, and it is expected as a material of MEMS. Three-dimensional through etching of titanium is possible by using our etcher, and we expect the etcher to be useful for the fabrication of titanium based sensors and actuators.
