抄録
This paper described micro point source atomizer employing a surface acoustic wave (SAW) streaming. In this device, we integrated a trench for supplying liquid and two pairs of interdigital transducer (IDT) on a 128°YX-LiNbO_3 substrate. The IDT was designed with arc shape to converge the energy of SAW. The device was evaluated with deionaized (DI) water as operation liquid. As a result, the device operated as a point source atomizer successively, and could produce sub-mm wide narrow mist spray.
