抄録
We investigated the effects of nano-structure on the thermoelectric property of porous Bi_<0.4>Te_<3.0>Sb_<1,6> thin films. We fabricated several size nano-templates by microphase-separation of block copolymers. Bi_<0.4>Te_<3.0>Sb_<1.6> was deposited by coaxial type vacuum arc evaporation method on the nano-template. Pore diameters of the porous thermoelectric thin films were 300 nm and 1 μm. The cross-plane thermal conductivity of porous Bi_<0.4>Te_<3.0>Sb_<1.6> thin film is 0.45 W/(m・K) by using 3ω method. The value was significantly reduced from flat- Bi_<0.4>Te_<3.0>Sb_<1.6> film. The figure of merit of the porous thermoelectric thin film was estimated to be ZT=0.41 at 300 K. We achieved improvement of ZT value comparable with flat- Bi_<0.4>Te_<3.0>Sb_<1.6> film.
