抄録
Aiming at the use in low-invasive medical treatments, a tungsten microneedle was fabricated by electrochemically etching a thin wire having 100 μm in diameter. A hole was fabricated on the tungsten needle by electrochemically etching a groove and making a lid on it by chemical vapor deposition of Parylene, followed by sputtering of tungsten. Both of delivering air and aspirating water were successfully achieved, showing that the fabricated needle is surely hollow.
