抄録
In this study, we demonstrate the fabrication of polymeric dry microneedle electrodes that can be applicable as flexible electrodes for biopotential measurements. Microneedles can penetrate the high-impedance stratum corneum, which eliminates the preparation that disc electrodes require. For the application, needles must be stiff enough to penetrate the stratum corneum and the conductive layer of the needle must be protected from peeling off during the insertion. We manufactured the electrode substrate using negative photoresist, SU-8, utilizing diffraction of UV light. After the conductive layer was vapor deposited onto the substrate, we coated the electrode surface with nanoporous parylene film as a protection layer. When the skin-contact impedance of the electrode was measured on subject's forearm while the electrode was compressed, sufficiently low electric impedance was achieved at the pressure of 8 N. This result verified that the proposed dry electrodes satisfied the required specifications for measurement of biopotential.
