20pm3-PM023 KOH水溶液に微量界面活性剤を添加した場合のシリコン異方性エッチング加工特性
詳細
This paper reports the effect of ppb-level non-ionic surfactant, Triton-X-100, on the etching of Si {100} and Si {110} in 5wt%,15wt%,30wt%,48wt% KOH solution. In pure 5 wt% KOH solution, micro-pyramids appear on the Si {100} etched surface. However, in 5wt%KOH with addition of ppb-level of Triton, the etched surface becomes mirror-like. This result shows that a ppb-level of Triton is adsorbed on the silicon surface during etching.
