マイクロ・ナノ工学シンポジウム
Online ISSN : 2432-9495
セッションID: 22pm1-E1
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22pm1-E1 低熱伝導材料のフォノン平均自由行程の測定
小宅 教文坂田 昌則塩見 淳一郎
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会議録・要旨集 フリー

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In this study, we have extracted the phonon mean free path of low thermal conductivity materials by time-domain thermoreflectance measurements with gold nanoislands. Firstly, 7 and 9 nm thick gold films were deposited on the material substrate by vacuum evaporation method, and then annealed at 500 ℃ and 900 ℃ to form gold nanoislands with various size-distributions. This realizes variation of the average contact area between the nanoislands and substrate. Secondly, the size-dependent thermal conductivity is obtained by time-domain thermoreflectance using femto-second laser beams: the gold nanoislands were heated up by the pump beam and its temporal thermal response by the probe beam, while the substrate is transparent to the beams. The size-dependent thermal conductivity values of fused quartz and sapphire agree with the solutions of the Boltzmann transport equation, from which the characteristic phonon mean free path can be obtained.

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© 2014 一般社団法人 日本機械学会
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