抄録
BiFeO3 thin film on DyScO3 substrate was fabricated by RF sputtering and annealing. The BFO thin film is expected to be used for ferroelectric memories, piezoelectric devices, sensors and solar cells. DyScO3 substrate is the smalllattice-mismatched substrates for BFO thin film. It was found that the (110) peak area which shows the crystallinity of BFO was appeared from X-ray diffraction (XRD). From results of X-ray photoelectron spectroscopy (XPS), BFO thin film has Fe2+ and Fe3+ statement. The materials of BiFeO3 thin film on DyScO3 substrate have the effectiveness in the future.
