シリコンナノワイヤ製ねじれ梁を用いた静電櫛歯駆動 MEMS ミラーの作製

抄録

In this report, a MEMS torsional mirror with torsion beams made of silicon nanowire has been proposed and was fabricated. The silicon nanowires on the device structure were batch-fabricated as the torsional beams. Torsional stress of the beams was decreased by downsizing the diameter of the beams considering the scale effect. We also have proposed the fabrication process of the mirror device which integrates the silicon nanowire of 1-μm square in the 5-μm-thick device layer of silicon-on-insulator wafer. The mirror of 100 μm square was designed and fabricated. The dimensions of the fabricated wires was same as that of designed, which shows that we successfully controlled the wire dimensions.