Assembled Micro-Tube Resonator for Mass Detection of Flowing Liquid

抄録

This research offers simple fabrication process of the microchannel resonator by assemblying to measure mass change in flowing liquid. Flowing liquid such as medium is generally flowing with micro/nano particles such as single cell in the microchannel. The fabrication process of this assembled micro-tube resonator is simply combining three different fabrications of a groove part, a micro-tube part, and a glass part, which are fabricated by common micromachining. The evaluated result of this device is shown that the measured mass by injecting the flowing liquid. The consistent change of mass of flowing liquid is observed. The minimum resolution of the device, which is calculated by noise analysis, is in the value of 1.04 pg.